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Synthesis and characterization of nanostructured ternary MAX-phase thin films prepared by magnetron sputtering as precursors for twodimensional MXenes
(Pontificia Universidad Católica del Perú, 2023-03-07)
MAX phase thin films can be fabricated through firstly depositing a precursor thin
film consisting of the initial elements M, A, and X close to the MAX phase stoichiometry
employing physical vapor deposition techniques ...